Bubble filtering system of wafer etching equipment

The utility model provides a bubble filtering system of wafer etching equipment. The bubble filtering system comprises a liquid supply channel, a bubble filter, a liquid outlet channel and a flow meter. The liquid supply channel is used for providing liquid medicine containing bubbles. The bubble fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YUAN LINTAO, LIU HUICHAO, CHEN YANBIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
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