Substrate transmission cavity manipulator cooling device and substrate transmission cavity manipulator

The utility model provides a substrate transmission cavity manipulator cooling device and a substrate transmission cavity manipulator, the substrate transmission cavity manipulator cooling device comprises two cooling semi-rings and a mounting assembly, the two cooling semi-rings are symmetrically arranged to form a cooling ring; a flow guide groove is formed in each cooling semi-ring, a water inlet and a water outlet are formed in each cooling semi-ring, and cooling media can circulate in the flow guide grooves; the mounting assembly is connected with the two cooling semi-rings and suitable for being connected with a mechanical arm. The substrate transmission cavity manipulator comprises the substrate transmission cavity manipulator cooling device and a driving mechanism. A connecting flange is arranged at the end part of the driving mechanism; and the substrate transmission cavity manipulator cooling device is connected with the connecting flange. 本实用新型提供了一种衬底传输腔机械手冷却装置和衬底传输腔机械手，所述衬底传输腔机械手冷却装置包括两个冷却半环和安装组件，