Quartz installation assembly of silicon epitaxy equipment

The utility model provides a quartz installation assembly of silicon epitaxy equipment, which belongs to the technical field of quartz processing equipment and comprises a base ring metal flange and an upper flange, an inner hole of the base ring metal flange is provided with a bearing table suitabl...

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Bibliographische Detailangaben
Hauptverfasser: FENG JUKUN, JIA JUNPENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a quartz installation assembly of silicon epitaxy equipment, which belongs to the technical field of quartz processing equipment and comprises a base ring metal flange and an upper flange, an inner hole of the base ring metal flange is provided with a bearing table suitable for bearing quartz, and an inner hole of the upper flange is provided with a boss; sealing rings suitable for being in contact with quartz are arranged on the bearing table and the boss; the quartz mounting assembly further comprises a positioning ring and a positioning structure; the positioning ring is suitable for being arranged in an inner hole of the metal flange of the base ring; the positioning ring is provided with a lifting part suitable for being in lap joint with the top of the metal flange of the base ring. The two ends of the positioning structure are suitable for being connected with the base ring metal flange and the upper flange correspondingly so as to position the position between the base ring