Waterproof driving device for carrying wafers
The utility model discloses a waterproof driving device used for carrying wafers, which comprises a shell and a driving module located in the shell, the driving module comprises a mechanical arm driving assembly and a shaft driving assembly, one end of the mechanical arm driving assembly is connecte...
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| creator | ZHANG PING WU YIMING WANG CHENXU MIAO YI QU QUANYOU WANG HEMING LIU YANG FURUICHI MASATOSHI ZHU JUNCHI |
| description | The utility model discloses a waterproof driving device used for carrying wafers, which comprises a shell and a driving module located in the shell, the driving module comprises a mechanical arm driving assembly and a shaft driving assembly, one end of the mechanical arm driving assembly is connected with the shaft driving assembly, and the other end of the mechanical arm driving assembly is connected with a mechanical arm. The shaft driving assembly drives the mechanical arm to move through the mechanical arm driving assembly. The shaft driving assembly is located in the shell, and the mechanical arm is located outside the shell. One end of the telescopic pipe is fixedly connected with the end, away from the shell, of the mechanical arm driving assembly, and the other end of the telescopic pipe is fixedly connected with the shell. The waterproof driving device used for carrying wafers provided by the utility model has a function of preventing water splashing, and can be suitable for different wafer carrying |
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The shaft driving assembly drives the mechanical arm to move through the mechanical arm driving assembly. The shaft driving assembly is located in the shell, and the mechanical arm is located outside the shell. One end of the telescopic pipe is fixedly connected with the end, away from the shell, of the mechanical arm driving assembly, and the other end of the telescopic pipe is fixedly connected with the shell. 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The shaft driving assembly drives the mechanical arm to move through the mechanical arm driving assembly. The shaft driving assembly is located in the shell, and the mechanical arm is located outside the shell. One end of the telescopic pipe is fixedly connected with the end, away from the shell, of the mechanical arm driving assembly, and the other end of the telescopic pipe is fixedly connected with the shell. 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The shaft driving assembly drives the mechanical arm to move through the mechanical arm driving assembly. The shaft driving assembly is located in the shell, and the mechanical arm is located outside the shell. One end of the telescopic pipe is fixedly connected with the end, away from the shell, of the mechanical arm driving assembly, and the other end of the telescopic pipe is fixedly connected with the shell. The waterproof driving device used for carrying wafers provided by the utility model has a function of preventing water splashing, and can be suitable for different wafer carrying</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING |
| title | Waterproof driving device for carrying wafers |
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