Waterproof driving device for carrying wafers

The utility model discloses a waterproof driving device used for carrying wafers, which comprises a shell and a driving module located in the shell, the driving module comprises a mechanical arm driving assembly and a shaft driving assembly, one end of the mechanical arm driving assembly is connecte...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG PING, WU YIMING, WANG CHENXU, MIAO YI, QU QUANYOU, WANG HEMING, LIU YANG, FURUICHI MASATOSHI, ZHU JUNCHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The utility model discloses a waterproof driving device used for carrying wafers, which comprises a shell and a driving module located in the shell, the driving module comprises a mechanical arm driving assembly and a shaft driving assembly, one end of the mechanical arm driving assembly is connected with the shaft driving assembly, and the other end of the mechanical arm driving assembly is connected with a mechanical arm. The shaft driving assembly drives the mechanical arm to move through the mechanical arm driving assembly. The shaft driving assembly is located in the shell, and the mechanical arm is located outside the shell. One end of the telescopic pipe is fixedly connected with the end, away from the shell, of the mechanical arm driving assembly, and the other end of the telescopic pipe is fixedly connected with the shell. The waterproof driving device used for carrying wafers provided by the utility model has a function of preventing water splashing, and can be suitable for different wafer carrying