Hanging tool and device for chip etching test
The utility model relates to the technical field of semiconductor manufacturing, and discloses a hanger and a device for a chip etching test, the hanger and the device comprise a bottom plate, clamping assemblies and two hanging rods, the upper surface of the bottom plate is provided with a groove,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of semiconductor manufacturing, and discloses a hanger and a device for a chip etching test, the hanger and the device comprise a bottom plate, clamping assemblies and two hanging rods, the upper surface of the bottom plate is provided with a groove, one or more clamping assemblies are arranged in the groove, and the two hanging rods are arranged on the bottom plate. Each clamping assembly comprises two positioning plates which are arranged in a spaced mode and used for clamping chips, the two positioning plates are vertically inserted into the grooves, a plurality of first through holes and a plurality of second through holes are formed in the bottom faces of the grooves, the first through holes are located between the two positioning plates of the same clamping assembly, and the second through holes are located between the two positioning plates of the same clamping assembly. The second through hole is located in the outer side of the clamping assembly. The l |
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