SF6/N2 mixed gas purity detection system

The utility model discloses an SF6/N2 mixed gas purity detection system, and belongs to the technical field of mixed gas concentration detection equipment. The device is characterized in that a gas outlet of the pressure stabilizing assembly is communicated with a gas inlet of the constant temperatu...

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Bibliographische Detailangaben
Hauptverfasser: YU XIANZE, ZHENG ZHIBIN, QU BAOJUN, ZHAO KUN, BAO YANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses an SF6/N2 mixed gas purity detection system, and belongs to the technical field of mixed gas concentration detection equipment. The device is characterized in that a gas outlet of the pressure stabilizing assembly is communicated with a gas inlet of the constant temperature detection module through the gas path switching assembly, a gas outlet of the constant temperature detection module is communicated with a gas inlet of the mass flow meter (9), and a gas inlet and a gas outlet of the oxygen concentration detection module are both communicated with the gas path switching assembly. The SF6/N2 mixed gas purity detection system can be used for detecting the O2 concentration, the SF6 concentration and the N2 concentration respectively, and the mixed gas can directly enter the constant-temperature detection module without passing through the oxygen concentration detection module, so that only the SF6 concentration and the N2 concentration in the mixed gas are detected; the situation t