Spray head
The utility model provides a spray header. The spray header comprises a splitter plate group and a frame, the splitter plate group comprises a first splitter plate and a second splitter plate; the first splitter plate and the second splitter plate are each provided with a plurality of first splitter...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a spray header. The spray header comprises a splitter plate group and a frame, the splitter plate group comprises a first splitter plate and a second splitter plate; the first splitter plate and the second splitter plate are each provided with a plurality of first splitter holes. The first splitter plate and the second splitter plate are provided with first splitter holes with different apertures or different pore densities, so that the flow rates of gas passing through the first splitter plate and the second splitter plate are different; the splitter plate group is embedded in the inner side of the frame; and the frame is used for surrounding and separating the first splitter plate and the second splitter plate, so that the frame and the splitter plate group are relatively fixed. The spray header is used for realizing thickness distribution of film layers in different forms.
本实用新型提供了一种喷淋头,包括:分流板组和框架;所述分流板组包括第一分流板和第二分流板;所述第一分流板和所述第二分流板均开设有若干第一分流孔;所述第一分流板和所述第二分流板设置的第一分流孔的孔径不同或孔隙密度不同, |
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