Double-Z-axis wafer carrying robot

The utility model discloses a double-Z-axis wafer carrying robot, and belongs to the technical field of semiconductors. In order to solve the problem that the design for achieving the large lifting stroke in the limited space is tedious, the double-Z-axis wafer carrying robot comprises a lifting device, a rotating device, a robot arm and an end effector which are sequentially arranged from bottom to top, the lifting device comprises a Z1-axis lifting device and a Z2-axis lifting device arranged in the Z1-axis lifting device in a sleeved mode, and the Z2-axis lifting device comprises a Z3-axis lifting device and a Z4-axis lifting device arranged in the Z3-axis lifting device in a sleeved mode. The rotating device is connected with the Z2-axis lifting device, the Z2-axis lifting device is driven by the Z1-axis lifting device to ascend and descend, and the rotating device is driven by the Z2-axis lifting device to ascend and descend. Large-stroke or segmented-stroke lifting in a small space is achieved by arrang