Cooling device suitable for minute-level power cycle test

The utility model relates to a cooling device suitable for a minute-level power cycle test. The device comprises a cold plate used for controlling the temperature of a to-be-tested semiconductor device in a test; the liquid cooling machine is used for providing a refrigerant for cooling the semicond...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI WENJIANG, LIAN XINGJIE, ZHANG WENLIANG, ZHANG JUNHUI, ZHU YANGJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a cooling device suitable for a minute-level power cycle test. The device comprises a cold plate used for controlling the temperature of a to-be-tested semiconductor device in a test; the liquid cooling machine is used for providing a refrigerant for cooling the semiconductor device to be tested by the cold plate and controlling the flow speed of the provided refrigerant flowing circularly through the cold plate so as to adapt to the minute-level power cycle test process of the semiconductor device to be tested; the refrigerant removing mechanism is in adaptive connection with the liquid cooling machine and is used for driving and sending the refrigerant remained in the cold plate back into the liquid cooling machine so as to remove the refrigerant remained in the cold plate; and the cold plate after the refrigerant is removed is utilized to adaptively heat the semiconductor power device to be tested in the minute-level power cycle test, or the cold plate after the refrigerant is