Bipolar plate integrated MEMS sensor and electronic cigarette
The MEMS sensor comprises a circuit board, an air pressure sensing element, an air pressure processing chip and a shell, the air pressure sensing element and the air pressure processing chip are installed on the circuit board, the shell is attached to the circuit board, the air pressure sensing elem...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The MEMS sensor comprises a circuit board, an air pressure sensing element, an air pressure processing chip and a shell, the air pressure sensing element and the air pressure processing chip are installed on the circuit board, the shell is attached to the circuit board, the air pressure sensing element comprises a base, the middle of the base is communicated with a first air hole and a second air hole to form an induction air channel, and the first air hole and the second air hole are communicated with each other. The first pole plate, the elastic membrane and the second pole plate are sequentially installed on the induction air channel of the base, and when airflow passes through, the elastic membrane deforms and is bent and close to the first pole plate or the second pole plate. According to the MEMS sensor, the deformation of the elastic membrane can be limited in a fixed range by arranging the bipolar plate, so that the elastic membrane is prevented from being damaged or failed due to excessive deformatio |
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