Pole piece rack sample barrel, pole piece placing rack and pole piece rack sample barrel combination

The utility model provides a pole piece rack sample barrel which comprises an air inlet end cover and a barrel body, the air inlet end cover is arranged at one end of the barrel body, an installation groove suitable for being connected with a rotating shaft is formed in the air inlet end cover, the installation groove is communicated with the barrel body, and a pole piece rack is suitable for being placed in the barrel body; the device further comprises a flow dividing block, the flow dividing block is arranged between the gas inlet end cover and the barrel body, and a plurality of through holes are formed in the flow dividing block so that precursor gas passing through the flow dividing block can be scattered. The utility model also provides a combination of the pole piece placing rack and the pole piece rack sample barrel, and by adopting the scheme of the utility model, the pole piece can be coated more uniformly. 本实用新型提供了一种极片架样品桶，包括进气端盖、桶体，所述进气端盖设置在所述桶体的一端，进气端盖上设置有适于连接旋转轴的安装槽，所述安装槽与所述桶体连通，所述桶体内适于放置极片架；还包括