Winding coating process gas protection plate

The utility model discloses a winding coating process gas protection plate which comprises a protection plate body arranged above a gas hole of a process gas pipeline, a positioning pin arranged below the protection plate body and used for connection and a sand blasting layer arranged above the prot...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI TINGGANG, QIU WENHAO, MA PEITING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a winding coating process gas protection plate which comprises a protection plate body arranged above a gas hole of a process gas pipeline, a positioning pin arranged below the protection plate body and used for connection and a sand blasting layer arranged above the protection plate body, and a gap is reserved between the protection plate body and the gas hole of the process gas pipeline. The protective plate can effectively protect the gas holes of the winding coating process gas from being blocked by a sputtering coating, so that the coating thickness is not uniform, and the product performance is influenced, the protective plate is additionally arranged, the process gas is diffused to the two sides through the protective plate in a direct injection mode, mixing is generated in the diffusion process, the mixing uniformity of the process gas can be improved, and the uniformity of a film layer is improved. 本实用新型公开了一种卷绕镀膜工艺气体护板,包括设置在工艺气体管道的气孔上方的护板、设置于护板下方的用于连接的定位销、设置于护板上方的喷砂层,所述护板与