Tooling for detecting blockage of gas shunting hole of upper electrode

The utility model discloses an upper electrode gas shunting hole blocking detection tool, which belongs to the technical field of detection and comprises a detection box. A through groove is formed in one side wall of the detection box; a lighting box capable of passing through the through groove is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OU LIMING, HU FEI, YANG ZUODONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses an upper electrode gas shunting hole blocking detection tool, which belongs to the technical field of detection and comprises a detection box. A through groove is formed in one side wall of the detection box; a lighting box capable of passing through the through groove is slidably connected into the detection box. A plurality of luminous tubes are arranged between two opposite side walls of the lighting box; a strip-shaped opening is formed in the side wall of the detection box, and sliding grooves communicated with the strip-shaped opening are formed in the other two adjacent side walls of the detection box; a semitransparent plate is connected into the sliding groove. An imaging plate is arranged at the opening of the detection box; the light-emitting tube emits light to irradiate the gas shunting hole of the upper electrode, and whether a light source exists on the imaging plate or not is judged, so that whether the gas shunting hole is blocked or not is judged; compared with th