Tray device for magnetron sputtering coating of cylindrical or annular neodymium iron boron product

The utility model provides a tray device for magnetron sputtering coating of a cylindrical or annular neodymium iron boron product. The tray device comprises a tray rack, a material placing rack, a magnetic component and a fastening device, wherein the material placing frame is in a plate body shape...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG XIAO'AI, WUYUN DELIGEER, LIU HAICHEN, WANG RONGXIA, CHANG SHUANGQUAN, ZHANG XIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a tray device for magnetron sputtering coating of a cylindrical or annular neodymium iron boron product. The tray device comprises a tray rack, a material placing rack, a magnetic component and a fastening device, wherein the material placing frame is in a plate body shape and is movably placed on the tray frame, the upper side face of the material placing frame is downwards provided with a plurality of rows of material placing grooves which are parallel to one another and have V-shaped sections, the two ends of the material placing grooves penetrate through the two sides of the material placing frame, and the material placing grooves are used for placing cylindrical or annular neodymium iron boron products to be sputter-coated; the magnetic assembly is movably attached to the lower side face of the tray frame and conducts position correction on neodymium iron boron products placed in the material placing frame on the upper side face of the tray frame through magnetic field force of