Supporting device for wafer detection
The utility model provides a supporting device for wafer detection. The supporting device comprises a base; the first groove is formed in the base, a first telescopic rod is fixedly installed at the bottom of the interior of the first groove, and a detection plate is fixedly installed at the positio...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a supporting device for wafer detection. The supporting device comprises a base; the first groove is formed in the base, a first telescopic rod is fixedly installed at the bottom of the interior of the first groove, and a detection plate is fixedly installed at the position, located in the first groove, of the top of the first telescopic rod; and the second groove is formed in the detection plate, a second telescopic rod is fixedly installed at the bottom of the interior of the second groove, and a partition plate is fixedly installed at the position, located in the second groove, of the top of the second telescopic rod. According to the supporting device for wafer detection provided by the utility model, the base, the first groove, the first telescopic rod, the detection plate, the clamping assembly, the second groove, the second telescopic rod, the partition plate and other structures are matched with one another, so that a wafer can be clamped and fixed when the wafer is detected |
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