Ion implantation electrode and ion implanter

The utility model relates to the technical field of semiconductor manufacturing equipment, and aims to provide an ion implantation electrode and an ion implanter, so that ion beams conveyed by the ion implantation electrode are more concentrated and higher. The ion implantation electrode comprises a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHAO CHAO, WANG HUATAO, FENG QINGLONG, ZHANG YU, DONG SHAOLONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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