Diaphragm compressor for separating neon and helium of large air separation equipment

The utility model discloses a diaphragm compressor for separating neon and helium of a large air separation plant. The compressor is composed of a machine body, a middle body, a crankshaft, a connecting rod, a crosshead, a comprehensive compensation oil pump, a cylinder body, a piston, an air inlet filter, a buffer, a cooler, an air-water pipeline system, a pressure regulating valve, a follow-up valve, an oil station, an oil supply system, a motor, a transmission mechanism and an instrument electric control system. The machine body and the middle body form a rack of the compressor; the crankshaft is mounted in the machine body; an annular water channel for cooling is arranged on a cylinder forge piece in a cylinder body, and an air inlet valve and an air outlet valve of a cylinder are closed net-shaped valves. The motor drives the crankshaft connected with the motor through the transmission mechanism, the crankshaft rotates to drive the connecting rod and the crosshead which are connected with each other, so