Laser radar multi-junction VCSEL array chip
The utility model relates to a laser radar multi-junction VCSEL array chip, which comprises a heat sink substrate, a P-type substrate, a P-type Bragg reflector, a luminous area and an N-type Bragg reflector are sequentially arranged on the heat sink substrate, and the luminous area is used for gener...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a laser radar multi-junction VCSEL array chip, which comprises a heat sink substrate, a P-type substrate, a P-type Bragg reflector, a luminous area and an N-type Bragg reflector are sequentially arranged on the heat sink substrate, and the luminous area is used for generating laser; the N-type Bragg reflector is recessed downwards to form a groove, the groove sequentially penetrates through the N-type Bragg reflector and the light-emitting area, the bottom of the groove extends into the P-type Bragg reflector, and N contact metal is arranged on the surface of the N-type Bragg reflector and in the groove. According to the utility model, the P-type Bragg reflector is arranged on the P substrate, so that a heat source is closer to the heat sink substrate (320W/m.K) with good thermal conductivity, and heat generated in the working process of the VCSEL device is quickly dissipated, thereby reducing the temperature of a junction region, facilitating the reduction of the drift distance o |
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