Electron excitation assembly, ionization device and ion implanter

The utility model provides an electron excitation assembly, a gas ionization device and an ion implanter, the electron excitation assembly comprises a first electron excitation piece and a second electron excitation piece, the first electron excitation piece comprises an electrode cap and a connecti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIE QISHAN, XIE BINGHONG, ZHAO YONG, XU JINGYANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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