Electron excitation assembly, ionization device and ion implanter

The utility model provides an electron excitation assembly, a gas ionization device and an ion implanter, the electron excitation assembly comprises a first electron excitation piece and a second electron excitation piece, the first electron excitation piece comprises an electrode cap and a connecting cylinder which are connected, and the electrode cap can be connected with a first power supply; the second electron excitation part comprises a first guide rod and a second guide rod which are oppositely arranged, the first guide rod and the second guide rod can be connected with a heat source or a second power source, a heat conduction part is arranged between the first guide rod and the second guide rod, one end of the heat conduction part is connected with the first guide rod, and the other end of the heat conduction part is connected with the second guide rod. The other end of the heat conduction piece is connected with the second guide rod, and the heat conduction piece is located in the connecting cylinder