Flow equalizing reaction tank

The utility model discloses a flow equalizing reaction tank, which belongs to the technical field of silicon wafer wet manufacturing equipment and cleaning equipment, and comprises a tank body in which flowing liquid is arranged, a plurality of groups of silicon wafers immersed in the liquid are placed in the tank body, and each group of silicon wafers is correspondingly arranged in a carrier; the bracket is arranged in the groove body and is used for supporting a carrier; and the vertical isolation structures are arranged between the adjacent carriers and are used for restraining liquid in the groove body from flowing towards the opening direction of the groove body along the surface of the silicon wafer. According to the scheme, the directional flowing capacity of liquid from bottom to top is improved, the situations of liquid transverse flowing and vortex retention are reduced, and the consistency and stability of chemical reaction in the whole reaction tank are improved. 本实用新型公开了均流反应槽，属于硅片湿制设备、清洁设备技术领域，其包