Large rotating mechanism for macroscopic inspection of crystal face

The utility model discloses a crystal face macroscopic inspection large rotating mechanism, which is characterized by comprising a base, a rotating module and a rotating module, the rotating module is fixed in an inner cavity of the base, the rotating module comprises a first motor, a turntable and a rack, the rack is fixed at the upper end of the turntable, and the rotating module is fixed in the inner cavity of the base. The rotating module comprises a second motor, a belt pulley module, a rotating shaft and a wafer adsorption mechanism, the wafer adsorption mechanism is fixed to the top end of the rack through the rotating shaft, the rotating shaft is connected with the second motor through the belt pulley module, and the second motor is fixed to one side of the rack. The rotating device is used for macroscopically inspecting the crystal face of the wafer. 本实用新型公开了一种晶面宏观检查大旋转机构，其特征在于：包括机座、旋转模组和转动模组，所述旋转模组固定在机座内腔，所述旋转模组包括第一电机、转盘和机架，所述机架固定在转盘上端，所述转动模组包括第二电机、皮带轮模组、转动轴和晶圆吸附机构，所述晶圆吸附机构通过转动轴固定在机架顶端，转动轴通过皮带轮模组与第二