Sensing unit and optical fiber Fabry-Perot vibration sensor using same

The utility model discloses a sensing unit and an optical fiber Fabry-Perot vibration sensor using the same. The sensing unit comprises a first diaphragm, a second diaphragm and a third diaphragm which are stacked in sequence, a cavity is formed between the first diaphragm and the third diaphragm, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIONG JIJUN, AN GUOWEN, JIA PINGGANG, LIU HUA, SU CHENGXIN, QIAN JIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING PHYSICS TESTING
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