Sensing unit and optical fiber Fabry-Perot vibration sensor using same

The utility model discloses a sensing unit and an optical fiber Fabry-Perot vibration sensor using the same. The sensing unit comprises a first diaphragm, a second diaphragm and a third diaphragm which are stacked in sequence, a cavity is formed between the first diaphragm and the third diaphragm, and the second diaphragm is provided with a mass block suspended in the cavity and a beam structure connected with the first diaphragm and/or the third diaphragm to support the mass block; the mass block has a light reflecting surface facing the first diaphragm, and the first diaphragm has a hole aligned with the light reflecting surface. According to the utility model, the sensing unit capable of improving the measurement accuracy and the optical fiber Fabry-Perot vibration sensor using the sensing unit can be provided. 本实用新型描述一种敏感单元及使用该敏感单元的光纤法珀振动传感器，该敏感单元包括依次层叠的第一膜片、第二膜片以及第三膜片；第一膜片与第三膜片之间形成有空腔，第二膜片具有悬置于空腔内的质量块、以及与第一膜片和/或第三膜片连接以对质量块进行支承的梁结构；质量块具有面向第一膜片的光反射面，第一膜片具有与光反射面对准的孔。根据本实用新型，能够提供一种提高测量精确度的敏感单元及使用该敏感单元的光纤法珀振动