Anti-reflection backlight plate for visual inspection of quartz boat silicon wafer
The utility model belongs to the field of silicon wafer detection, and particularly relates to an anti-reflection backlight plate for visual inspection of a quartz boat silicon wafer, which comprises a bottom plate. A base is fixedly connected to the bottom plate, a first backlight plate is arranged...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model belongs to the field of silicon wafer detection, and particularly relates to an anti-reflection backlight plate for visual inspection of a quartz boat silicon wafer, which comprises a bottom plate. A base is fixedly connected to the bottom plate, a first backlight plate is arranged on the top of the base and installed on the base through a limiting mechanism, two first positioning columns are fixedly connected to the top of the base and penetrate through the first backlight plate, and two second backlight plates are arranged on the top of the bottom plate and penetrate through the first positioning columns. The second backlight plate is installed on the bottom plate through a limiting assembly, eight second positioning columns are fixedly connected to the top of the bottom plate and penetrate through the second backlight plate, and the top of the first backlight plate and the top of the second backlight plate are both arranged to be frosted faces. The top of the first backlight plate and the |
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