Ceramic ring leak detection clamp simulating on-machine environment

The utility model belongs to the technical field of semiconductor equipment leak detection, and provides a ceramic ring leak detection clamp simulating an on-machine environment, which comprises a base and a housing, and the top surface of the base is used for fitting the bottom surface of a product...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG MU, GU RENBAO, ZHU WENJIAN, XUE HONGYU, WEI SHAOHUA, YANG GUOJIANG, YU XIAOWEI, SUN XIAONAN, LI WEIDONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model belongs to the technical field of semiconductor equipment leak detection, and provides a ceramic ring leak detection clamp simulating an on-machine environment, which comprises a base and a housing, and the top surface of the base is used for fitting the bottom surface of a product to be detected; the housing is arranged on the upper side of the base in parallel and used for being attached to the top face of a to-be-tested product. Wherein the cover shell is provided with a cavity, the top of the cover shell is provided with a connector, one end of the connector is communicated with the cavity, and the other end of the connector is used for being connected with a helium mass spectrometer leak detector; when the base and the housing are attached to a to-be-detected product, a detection gap is formed between the base and the housing and is used for exposing the side face of the to-be-detected product. According to the invention, the loading condition of the ceramic ring can be simulated, wheth