Coating machine for coating plane base material
The utility model relates to a coating machine for coating a plane base material, which comprises a coating cavity and a substrate frame, the substrate frame is positioned in the coating cavity, the coating machine further comprises a movable base capable of realizing reciprocating motion, the subst...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a coating machine for coating a plane base material, which comprises a coating cavity and a substrate frame, the substrate frame is positioned in the coating cavity, the coating machine further comprises a movable base capable of realizing reciprocating motion, the substrate frame is mounted on the movable base along the X-axis direction, and at least one ion source unit is arranged in the coating cavity on the outer side of the substrate frame. According to the coating machine for coating the plane base material disclosed by the utility model, the substrate frame can move back and forth in the coating inner cavity along the X-axis direction through the movable base which is arranged in the coating inner cavity and can move back and forth, so that a substrate can be uniformly coated; the distance between the substrate frame and the ion source in the vertical direction is consistent, so that the uniformity of the thickness of the coating on the substrate on the surface of the whole |
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