Argon tail gas treatment device for single crystal furnace

The utility model discloses a single crystal furnace argon tail gas treatment device which comprises a treatment assembly, and the treatment assembly comprises a bottom plate, a filter box, a motor, a groove, a fixing rod, a filter plate, a spring, an eccentric wheel, a round rod and a hinge rod. A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FENG ZHONGYI, FU CHANGCHUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a single crystal furnace argon tail gas treatment device which comprises a treatment assembly, and the treatment assembly comprises a bottom plate, a filter box, a motor, a groove, a fixing rod, a filter plate, a spring, an eccentric wheel, a round rod and a hinge rod. A filter box is fixedly mounted at the top of the bottom plate, a motor is fixedly mounted on the left side of the filter box, and grooves are formed in the inner walls of the two sides of the filter box. The motor drives the eccentric wheel to rotate, the eccentric wheel drives the round rod to rotate, the round rod drives the filter plate to move through the hinge rod, the filter plate compresses the spring, when the eccentric wheel rotates to the rear half circle, the spring drives the filter plate to move downwards, and the motor circularly drives the filter plate to move up and down. And vibration generated in the process vibrates solid impurities attached to the surface of the filter plate into a collecting box