MEMS micromirror array

According to the MEMS micromirror array provided by the utility model, the plurality of MEMS micromirrors are respectively fixedly arranged on the wiring substrate and are electrically connected with the wiring substrate, so that the yield of the MEMS micromirror array can be remarkably improved, the processing and manufacturing difficulty of the MEMS micromirror array is reduced, the manufacturing process is simple, and the production cost is reduced. And the arrangement mode, the arrangement position, the number of micro-mirrors and the like of the MEMS micro-mirror array can be more flexible and convenient, and the application field of the MEMS micro-mirror array can be further expanded. 本实用新型提供一种MEMS微镜阵列，通过将多个MEMS微镜分别在布线基板上进行固定排列及与布线基板进行电连接，可显著提高MEMS微镜阵列的成品率，降低MEMS微镜阵列的加工制造难度，可使得制造工艺简单，并且MEMS微镜阵列的排布方式、排布位置、微镜数量等可更加灵活便捷，有助于进一步拓展MEMS微镜阵列的应用领域。