Ion source monitoring structure

The utility model discloses a structure for monitoring an ion source, which comprises an ion transmission assembly and an ion observation assembly, the ion transmission assembly is detachably connected with the ion observation assembly, the ion transmission assembly comprises a transmission piece, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG KUN, ZHOU YUANKANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a structure for monitoring an ion source, which comprises an ion transmission assembly and an ion observation assembly, the ion transmission assembly is detachably connected with the ion observation assembly, the ion transmission assembly comprises a transmission piece, a transmission through hole is arranged in the transmission piece, the transmission through hole is connected with the ion observation assembly, and the ion observation assembly is connected with the transmission piece. The ion observation assembly comprises an observation shell, an observation through hole is formed in the observation shell, the observation through hole is connected with the transmission through hole, and the observation through hole and the transmission through hole are coaxially arranged. Ions generated by the ion generator are transmitted through the ion transmission assembly, the ions are observed and detected through the ion observation assembly, the structure is simple, and installation is co