Drainage protection device for cooling pipe of ion implanter

The utility model discloses a drainage protection device for a cooling pipe of an ion implanter, which comprises a two-way joint, a drainage device and a protection device, the two-way joint is provided with a first end part and a second end part, the first end part is connected with a machine table...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WU JIANZHANG, CHAI LILIN, ZHANG JIANSHENG, HE WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!