Drainage protection device for cooling pipe of ion implanter

The utility model discloses a drainage protection device for a cooling pipe of an ion implanter, which comprises a two-way joint, a drainage device and a protection device, the two-way joint is provided with a first end part and a second end part, the first end part is connected with a machine table...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WU JIANZHANG, CHAI LILIN, ZHANG JIANSHENG, HE WEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a drainage protection device for a cooling pipe of an ion implanter, which comprises a two-way joint, a drainage device and a protection device, the two-way joint is provided with a first end part and a second end part, the first end part is connected with a machine table pipeline, the second end part is provided with a first interface and a second interface which are coaxially arranged, and the protection device is connected with the drainage device. The cooling pipe is detachably connected to the first connector; the drainage device comprises a drainage tube and a drainage tube, the drainage tube is detachably connected to the second connector, a first opening is formed in the drainage tube, and the drainage tube is connected to the drainage tube through the first opening; the protection device comprises a water storage tank, and the water storage tank is arranged under the drainage pipe. According to the device, the cooling pipe is embedded in the drainage pipe, the cooling pipe