Pointed cone target degassing device
The utility model discloses a pointed cone target degassing device which comprises a water tank unit made of organic glass; the structural framework unit is arranged on the lower surface of the water tank unit and used for supporting and fixing the water tank unit; the protecting and fixing unit is...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model discloses a pointed cone target degassing device which comprises a water tank unit made of organic glass; the structural framework unit is arranged on the lower surface of the water tank unit and used for supporting and fixing the water tank unit; the protecting and fixing unit is arranged on the upper surface of the structural framework unit, and the water tank unit is arranged in the protecting and fixing unit; the display unit is arranged on the side edge of the structural framework unit; the negative pressure unit is arranged on the structural framework unit and connected with the water tank unit; and a circuit control unit. The temperature protector arranged on the pointed cone target degassing device cuts off a circuit when the temperature of the vacuum pump is too high, so that the vacuum pump is protected, and the safety of the whole equipment is ensured; the arranged organic glass water tank enables an operator to observe the degassing process of the pointed cone target, no addition |
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