Sample bearing table for bearing substrates with different diameters and device of sample bearing table

The utility model provides a bearing sample table for bearing substrates with different diameters and a device thereof. The bearing sample table comprises a first bearing mechanism, a second bearing mechanism, a third bearing mechanism and a fourth bearing mechanism, the first bearing mechanism comp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHENG FANG, GE MINGXIN, CUI CHANGCAI, CHEN TAO, ZHANG YAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a bearing sample table for bearing substrates with different diameters and a device thereof. The bearing sample table comprises a first bearing mechanism, a second bearing mechanism, a third bearing mechanism and a fourth bearing mechanism, the first bearing mechanism comprises a first bearing surface with a hollow central part and a first cantilever beam structure detachably arranged at a first position of the first bearing surface, the first cantilever beam structure is used for bearing a substrate, and a second position of the first bearing surface is used for being detachably connected with a sample bearing device; the second position of the second bearing surface is detachably arranged on the first position of the first bearing surface, and the second position of the third bearing surface is detachably arranged on the first position of the second bearing surface. And the second position of the fourth bearing surface is detachably configured on the first position of the third be