Shading device for wafer

The utility model provides a shading device for a wafer, which comprises a mounting seat provided with an air outlet hole; the shading ring is arranged on the mounting seat; the air path is arranged in the mounting seat and is communicated with the air outlet hole; wherein the mounting seat does not shield the through hole of the shading ring, the gas path can introduce external gas into the gas outlet hole, and the gas outlet hole can spray gas to the wafer so as to ensure the cleanliness of the annealing light spot of the wafer. Based on the technical scheme of the utility model, the gas circuit is integrated in the shading device, so that the shading device has double functions, namely, the shading ring of the shading device can protect the edge of the wafer, and the risk of wafer fragmentation in the annealing process is avoided. And clean gas is blown out through the gas path of the shading device and the gas outlet hole, so that pollution to the annealing surface of the wafer is reduced. Therefore, the