Airtight packaging differential capacitance accelerometer signal detection circuit housing

The utility model discloses an airtight packaging differential capacitance accelerometer signal detection circuit housing, comprising a ceramic substrate which is provided with a cavity and can be subjected to airtight packaging and a matched metal base, the ceramic substrate comprises a ceramic sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SHANG AIYING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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