Wafer loader and vertical furnace
The utility model provides a wafer loader and a vertical furnace. The wafer loader comprises a wafer loader body. A first positioning member; the movable stand is connected with a second positioning piece; and the connecting piece is detachably connected with the second positioning piece and the fir...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a wafer loader and a vertical furnace. The wafer loader comprises a wafer loader body. A first positioning member; the movable stand is connected with a second positioning piece; and the connecting piece is detachably connected with the second positioning piece and the first positioning piece. Wherein the wafer loader body is installed on the movable stand, and the second positioning piece is configured to be capable of being in butt joint with the first positioning piece by horizontally moving along with the movable stand. Through the cooperation of the first positioning piece and the second positioning piece, the wafer loader can be conveniently installed at a preset position in the vertical furnace by a worker, and the positioning precision is high. The first positioning piece and the second positioning piece are connected through the connecting piece, so that the position of the wafer loader can be fixed, and the wafer loader is prevented from moving when equipment runs.
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