PLC automatic control cooling system based on clean room process equipment

The utility model discloses a PLC automatic control cooling system based on clean room process equipment, which comprises a PLC, a buffer water tank, a water supply pipeline, a water return pipeline, a water pumping device, a chilled water loop and a heat exchanger, and the water supply pipeline and the water return pipeline are respectively communicated with the buffer water tank and the clean room process equipment; the water pumping device is provided with three water pumps which are all arranged on the water supply pipeline, and the three water pumps are electrically connected with the PLC through frequency converters respectively. The water supply pipeline and the chilled water loop are both connected to the heat exchanger for heat exchange. Wherein the water supply pipeline and the water return pipeline are respectively provided with a temperature sensor and a pressure sensor, a bypass electric valve and a pressure difference sensor are arranged between the water supply pipeline and the water return pip