Graphite cover for growing silicon carbide single crystal by PVT method

The utility model relates to the field of silicon carbide single crystal growth thermal field devices, and particularly discloses a graphite cover for growing silicon carbide single crystals by a PVT method, which comprises a seed crystal support and a flow guide component, the flow guide component...

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Hauptverfasser: YIN YUNCHUAN, SHA ZHIYONG, YANG HAIPING, LIU DEWEI, HUANG SIJIANG, YIN GUI, WANG MEICHUN, PU SHIKUN, LI BAOXUE
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creator YIN YUNCHUAN
SHA ZHIYONG
YANG HAIPING
LIU DEWEI
HUANG SIJIANG
YIN GUI
WANG MEICHUN
PU SHIKUN
LI BAOXUE
description The utility model relates to the field of silicon carbide single crystal growth thermal field devices, and particularly discloses a graphite cover for growing silicon carbide single crystals by a PVT method, which comprises a seed crystal support and a flow guide component, the flow guide component is connected with the seed crystal support through threads or buckles, the graphite cover comprises a cylindrical diameter expanding ring and a flow guide ring, a certain distance is reserved between the diameter expanding ring and the flow guide ring, and the flow guide ring is connected with the seed crystal support through threads or buckles. And a circulating chamber is defined by the seed crystal support and is provided with a flow guide inclined plane. By adopting the technical scheme, the graphite cover is connected with the graphite crucible to form a closed or semi-closed space for crystal growth; the flow guide inclined plane is arranged to guide the flow direction of the silicon carbide powder atmosphere
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subjects AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
CHEMISTRY
CRYSTAL GROWTH
METALLURGY
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
title Graphite cover for growing silicon carbide single crystal by PVT method
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