Magnetron sputtering vacuum coating machine

The magnetron sputtering vacuum coating machine comprises an electric box, a control panel is installed at one end of one side of the electric box, a vacuum chamber is installed in the middle of the top of the electric box, and a first flange is installed in the middle of the end, close to the contr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	WANG HONGFEI, XIONG LANG, LIN MENGTIAN, ZHANG YEFANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The magnetron sputtering vacuum coating machine comprises an electric box, a control panel is installed at one end of one side of the electric box, a vacuum chamber is installed in the middle of the top of the electric box, and a first flange is installed in the middle of the end, close to the control panel, of the vacuum chamber; a second flange is mounted in the middle of the end, away from the first flange, of the vacuum chamber, a third flange is mounted in the middle of the side, away from the control panel, of the vacuum chamber, and mounting frames are mounted at the two ends of the side, close to the control panel, of the top of the vacuum chamber; and electric cylinders are installed at the two ends of the side, close to the control panel, of the top of the vacuum cabin through installation frames correspondingly, and movable plates are movably installed at the two ends of the side, close to the control panel, of the vacuum cabin correspondingly. According to the device, a worker can fix a plated par