Thin wafer cleaning basket

The utility model discloses a thin wafer cleaning basket, the thin wafer cleaning basket comprises a pair of substrates, a pair of side arms connected with the pair of substrates, and a top beam connected with the pair of substrates, and the substrates are provided with trapezoidal clamping grooves used for connecting the side arms and the top beam. The inclined side wall and the top beam with the limiting teeth and the limiting grooves act together, and shaking of the thin wafer in the cleaning process can be stably limited. The thin wafer cleaning device is simple in structure and easy to manufacture and assemble, cleaning quality can be guaranteed in the wet cleaning process of the thin wafer, meanwhile, a good protection effect can be achieved on the thin wafer, and the wafer cracking rate is reduced. 本实用新型公开了一种薄晶圆清洗花篮，所述薄晶圆清洗花篮包括一对基板、与所述一对基板连接的一对侧臂、与所述一对基板连接的顶梁，所述基板上设置有梯形卡槽，用于连接侧臂和顶梁。倾斜的侧壁与带限位齿、限位槽的顶梁共同作用，可稳定地限制薄晶圆在清洗过程中的晃动。本实用新型结构简洁，易于制造和组装，在薄晶圆的湿法清洗过程中既可保证清洗质量，同时还可对薄晶圆实现良好的保护效果，降低裂片率。