Diffusion equipment

The utility model provides diffusion equipment which comprises a furnace body, a quartz boat and a filling pipe, the furnace body is provided with a furnace door, an air inlet and an air outlet are formed in the furnace body, the air outlet is far away from the furnace door, the quartz boat is arranged in the furnace body and located at the lower end of the furnace body, the filling pipe is a closed pipeline, and the filling pipe is arranged in the furnace body. And the baffle is positioned at the upper end of the furnace body. The gas outlet is far away from the furnace door, so that reaction gas exists in the furnace body as long as possible, and the reaction rate of the reaction gas is improved. Besides, the filling pipe is arranged in the furnace body, so that the resistance of airflow is increased, the reaction gas is prevented from being directly pumped away from the gas outlet, the utilization rate of the reaction gas is further improved, and the production cost is reduced. 本实用新型提供了一种扩散设备包括：炉体，具有炉门，所述炉