Crystal cooling device

The utility model discloses a crystal cooling device which comprises a graphite sleeve and a water-cooled jacket with a hollow interlayer which are coaxially arranged from inside to outside, an axial through hole for a crystal pulling rod to penetrate through is formed in the center of the graphite...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHONG YOUSHENG, WANG JUNREN, SHI BIN, WU HONGMING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a crystal cooling device which comprises a graphite sleeve and a water-cooled jacket with a hollow interlayer which are coaxially arranged from inside to outside, an axial through hole for a crystal pulling rod to penetrate through is formed in the center of the graphite sleeve; a graphene coating is arranged on the inner wall of the graphite sleeve; the cooling device further comprises an argon system; and the argon system downwards conveys argon for cooling along the outer wall of the water-cooled jacket. According to the invention, through a triple cooling system of graphene heat radiation, water-cooled jacket water cooling and argon cooling, the crystal bar rapidly passes through a characteristic temperature interval (1100-1070 DEG C) for growth and nucleation of void defects, and the crystal quality is effectively improved. 本实用新型公开了一种晶体冷却装置,由内至外包括同轴设置的石墨套筒、以及具有空心夹层的水冷套;所述石墨套筒的中心设有供拉晶棒穿过的轴向通孔;所述石墨套筒的内壁上设有石墨烯涂层;所述冷却装置还包括氩气系统;所述氩气系统沿所述水冷套的外壁向下输送用于冷却的氩气。本申请通过石墨烯热量辐射、水冷套水冷冷却、氩气冷却三重