Coating cavity of HWCVD (High Weight Chemical Vapor Deposition) equipment

The utility model discloses a coating cavity of HWCVD (High Weight Chemical Vapor Deposition) equipment, which is characterized in that a plurality of rows of hot wires and a plurality of support plates are arranged in a single cavity, the distance between each support plate and a hot wire row facing the support plate is 1-13cm, the distance between each support plate and an adjacent hot wire row is the same or different, the distance between adjacent hot wires in the hot wire row is 1-13cm, and the distance between the hot wires in the hot wire row is the same or different. By adopting the cavity disclosed by the utility model for coating, not only can the consistency of coating of each support plate be kept, but also the coating temperature and the coating speed of a sample can be obviously improved, so that the capacity of equipment is improved by several times, the energy consumption of single capacity of the equipment is reduced, and the manufacturing cost and the operating cost of the equipment are grea