Mechanical arm for adsorbing wafer and semiconductor equipment

The utility model discloses a mechanical arm for adsorbing wafers and semiconductor equipment, the mechanical arm comprises a main body part, and a first cantilever and a second cantilever which are located at the same side of the main body part, and the first surface of the first cantilever, the fi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LI ZHOUJIN, ZHANG LIANG, WU YUGUAN, LAI DONGMING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The utility model discloses a mechanical arm for adsorbing wafers and semiconductor equipment, the mechanical arm comprises a main body part, and a first cantilever and a second cantilever which are located at the same side of the main body part, and the first surface of the first cantilever, the first surface of the second cantilever and the first surface of the main body part are respectively provided with at least one vacuum chuck. A first suction cup is arranged on the first cantilever, a second suction cup is arranged on the second cantilever, and a third suction cup is arranged on the main body part; the included angle between the connecting line of the first suction cup and the second suction cup and the connecting line of the first suction cup and the third suction cup is 45 degrees, or the included angle between the connecting line of the second suction cup and the first suction cup and the connecting line of the second suction cup and the third suction cup is 45 degrees. The bearing stability can be