Microbubble integrated Fabry-Perot structure resonant cavity sensing chip
The utility model belongs to the technical field of optical sensing detection, and particularly relates to a micro-bubble integrated Fabry-Perot structure resonant cavity sensing chip. The optical sensing chip provided by the utility model comprises two plane mirrors, a quartz microtube with a hollo...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model belongs to the technical field of optical sensing detection, and particularly relates to a micro-bubble integrated Fabry-Perot structure resonant cavity sensing chip. The optical sensing chip provided by the utility model comprises two plane mirrors, a quartz microtube with a hollow microbubble in the middle, and two square quartz tubes, the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are arranged on the left and right sides of the two plane reflectors, so that the two reflectors are kept highly parallel; the hollow quartz microbubble is arranged between the two plane reflectors, and the two ends of the hollow quartz microbubble are bonded and fixed with the plane reflectors to form a microbubble integrated Fabry-Perot structure resonant cavity sensing chip; the surface of the plane mirror is plated with a metal film or a dielectric film with specific reflectivity. Based on the lens effect of microbubbles, the sensing chip has the characteristic |
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