Novel ALD aluminum boat positioning block

The utility model relates to a novel ALD aluminum boat positioning block which comprises a mounting plate, connecting rods are installed in the left side and the right side of the mounting plate, limiting blocks are arranged on the surfaces of the left side and the right side of each connecting rod,...

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Bibliographische Detailangaben
Hauptverfasser:	PAN CHANGLIANG, LI ZHENGQING, ZHU TENGJUN, XU XIAOBIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model relates to a novel ALD aluminum boat positioning block which comprises a mounting plate, connecting rods are installed in the left side and the right side of the mounting plate, limiting blocks are arranged on the surfaces of the left side and the right side of each connecting rod, the surfaces of the inner ends of the limiting blocks are connected with compression springs, and the other ends of the compression springs are connected with the inner wall of the mounting plate. A mounting block is fixedly mounted at the top end of the inner side of the connecting rod, the connecting rod is connected with the fixing plate through the mounting block, side plates are arranged on the surfaces of the lower portions of the front end and the rear end of the mounting plate, the mounting plate and the side plates are connected through connectors, and extrusion springs are mounted on the inner sides of the middles of the connectors; and the surfaces of the top ends of the two sides of the extrusion sprin