Combined vacuum ion coating equipment

The utility model relates to combined vacuum ion coating equipment. A composite multi sphere magnetic control sputtering target in a cylinder shape is installed on the central axis of a vacuum chamber, and the target is divided into four segments at least; the vacuum chamber side wall is provided wi...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SUN YUQIN, GAO JINBIN, LUAN SHAOPU
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The utility model relates to combined vacuum ion coating equipment. A composite multi sphere magnetic control sputtering target in a cylinder shape is installed on the central axis of a vacuum chamber, and the target is divided into four segments at least; the vacuum chamber side wall is provided with three magnetic control multi sphere evaporator sources 17 at least; a work piece support 12 which can revolve, rotate and exert negative bias is arranged in the vacuum chamber; a pair of heating filaments 13 which can exert negative pressure and emit electrons are hung in the vacuum chamber vertically. The utility model needs little gold, while the gold sputtering is uniform, and the number of work pieces that the equipment can load is large.