High-precision temperature control device for indium phosphide growth

The utility model relates to the technical field of indium phosphide production, in particular to a high-precision temperature control device for indium phosphide growth. According to the technical scheme, the smoke exhaust device comprises a smoke exhaust assembly, a shell, an air guide pipe and a...

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Bibliographische Detailangaben
Hauptverfasser:	ZHAN ZEXING, MENG KUIZHI, ZHAN XIANHUA, ZHAN ZERUI, YU HUIPING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEPARATION SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The utility model relates to the technical field of indium phosphide production, in particular to a high-precision temperature control device for indium phosphide growth. According to the technical scheme, the smoke exhaust device comprises a smoke exhaust assembly, a shell, an air guide pipe and a heat insulation box, two sets of foot pads are installed on the two sides of the bottom of the shell, the smoke exhaust assembly is installed on the top of the shell, an installation cover is installed in the smoke exhaust assembly, an axial flow fan is installed on the top in the installation cover, an insertion groove is formed in the outer side in the installation cover, and a filter screen plate is installed in the insertion groove; a waste tank is installed at the bottom of the filter screen plate, and electrical boxes are installed on the two sides of the bottom in the shell. According to the utility model, the insertion groove is formed in the mounting cover, so that the handle with the filter screen plate c